N2 Purge System
(LPM, BIP, CFB)
JFS U1, U5
Airflow forming device that controls the internal humidity of the FOUP raised by EFEM inflow to 1 to 5%
EFEM dehumidification
This product achieves low humidity by providing dehumidified air inside the EFEM for the purpose of controlling defects caused by moisture inside the EFEM.