N2 Purge Load Port
Introduction
Load-port with N2 purge function inside the FOUP for the purpose of suppressing humidity and contamination inside the FOUP
Technology
MFC Real Time Flow Control
N2 Nozzle Cylinder Up/Down
Leak Free Nozzle Purge System
FOUP Humidity Status Real Time Monitor
Upper Stream SECS/GEM Software applied
User Interface Recipe Control
O2 Detection Safety Interlock
Easy Retrofit Sequence
Specification
3 in 1 / 1 in 1 FOUP N2 Purge
1 & 2 MFC (100LPM/200LPM)
Control Box or Load Port Built in N2 Control System
FOUP Type detection sensor applied. (Option)
N2 Inlet Filter : 0.0025um
N2 Inlet Leak Detection : Pressure Sensor
Exhaust Pressure Detection : Pressure Sensor
PN2 Tube Material: SUS316-EP, polyolefin
Facility N2 connection : Bottom of Load Port
N2 BIP(Built In Purge)
Introduction
A system that applies the N2 FOUP Purge function to FOUP in the Diffusion Vertical Batch System.
Technology
Leak Free Nozzle Purge System
Upper Stream SECS/GEM Software applied
User Interface Recipe Control(PC Software)
Justem Electrical CPU & Logic Program
Easy Retrofit Sequence
Specification
10H, 14CH, 16CH Built In Purge System
Main Power : AC208V / 110V, 1Φ / 3A(50/60Hz)
Utility : PN2 (1/2” Swagelok, 500~750 kPa)
EXHAUST (3/4”, 2EA -100kPa, Flow > 320 LPM)
FOUP Detection : Placement Sensor
Leak Detection : Differential Pressure Sensor
N2 Inlet Filter : 0.0025um
N2 Flow Detection : Flow Meter
N2 BIP(Built In Purge)
Introduction
Temperature/Humidity Management Buffer by N2 Purge Nozzle + Buffer Heating
A module that is mounted on the side/rear of the EFEM and performs N2 purge on each wafer stored inside the open-type buffer while controlling/maintaining the temperature/humidity atmosphere inside the buffer through buffer heating.
Technology
Concise Set-up
After removing the door on the EFEM side/rear, docking and leveling
Stable humidity management
Ideal humidity management by specialized N2 Purge Nozzle
Buffer Condition Monitoring
Tilt/continuous monitoring of buffer condition by various sensors
Efficient Fume Removal
Securing efficient exhaust performance by applying 2-way valve-box
Specification
Maintained humidity: ≤ 5% (controllable)
Body Size: 600mm x 600mm x 1550mm (based on 50 steps)
Material : SUS , SS41
Weight : 105Kg
N2 consumption: 615 LPM
