Introduction
This product achieves low humidity by providing dehumidified air inside the EFEM for the purpose of controlling defects caused by moisture inside the EFEM.
Technology
Power reduction technology applied to heat exchanger
PCW applied Room Temp. maintenance skills
Configuration of various supply lines
Directly down circulating and non-circulating lines, side feeding, rear feeding
Automatic humidity control technology
Wide range of humidity adjustment (5~45%)
Securing vibration control technology by applying vibration-proof parts
Specification
humidity control
Circulating EFEM internal humidity ≤ 5%, temperature ≤ 40℃
Non-circulating EFEM internal humidity ≤ 8%, temperature ≤ 40℃
Power Consumption : 11 Kw (Max. 14 kW)
