Introduction
Airflow forming device that controls the internal humidity of the FOUP raised by EFEM inflow to 1 to 5%
Technology
JFS U5
By operating air with a humidity of 45% inside the EFEM, the humidity inside the FOUP is controlled to less than 5%.
JFS U1
Controls FOUP internal humidity to 1% by introducing external low-humidity gas (CDA, N2)
Vertical laminar flow formation technology (Laminar Flow)
Particle Free
Specification
JFS U5
410 (L) x 106 (D) x 201 (H) mm/port
Power consumption 200W/port
JFS U1
384 (L) x73.5 (D) x 77 (H) mm/port
Power consumption 50W/port
CDA 250 LPM/port
