Introduction
Graphite frame for wafer transport and storage in the PECVD process
Technology
Minimize wafer damage and defect rate
Maximize safety by applying RF electrode type and using high-purity graphite.
User Customizing
Customized graphite boats other than ready-made sizes are available.
Specification
Wafer Size : 6” (Customizing)
Body Size : 280mm x 600mm x 2850mm (Max.)
Material: Graphite (high purity) + Ceramic
Weight : 28Kg
