Organic vacuum drying device for large-area displays

• Excellent temperature uniformity: ±3℃ (10.5G board)

• World's highest drying uniformity: ≤ 10% (10.5G substrate)

• Secure layered design for mass production operation

• Exhaust system to create uniform vacuum

• Layout : 4260X4890X3085 (10.5G)

• Base Pressure : 5X 10-5 torr

• Pumping Speed : <2min (@7.5 X 10-5 torr)

• It is a device that dries, transports, and loads in vacuum conditions before and after the LCD/OLED process.

• Minimize Volume.

• Safety is ensured by applying Sensor Dual Type.

• Real-time confirmation using CCTV inside the chamber.

• O-ring groove shape optimized to prevent metal grinding.

• Prevents foreign substances from entering the logistics equipment by maintaining a higher pressure than the PM Chamber.

• Gas detector applied to check process gas inflow.

• degree of vacuum : ≤ 5.0 x 10-7Torr (TBD)

• Material, Thickness: As per specification (TBD)

• Sensor: Apply Sample, Fork, Position detection

• Gauge : ATM, Full Range, High, Middle Vacuum Gauge

• Sample Type : Face Down, Face UP

• After treatment : SBB, Buffing , E.P , Anodizing

• Tack Time : 50sec

• Lid open : Auto Lid , Crain

• Vent : CDA, N2 (Slow, Fast)

• Stress, strain: 215Mpa, 5mm or less

LManage oxygen and moisture with the circulating gas purifier of the CD/OLED N2 Chamber

• Minimize size.

• Purification capacity increased compared to existing purifier (approximately 1.5 times)

• Volume : 5m³ ~ 100m³

• PPM : ≤ 1ppm (Oxygen / Moisture)

• Type : Touch Panel / Ethernet I.O

• Applicable equipment : LCD, OLED TM, Buffer, Oven, etc

Real-time static electricity elimination device for high vacuum (vacuum degree constant)

In the OLED manufacturing process, panel transfer and alignment/masking are repeated due to mechanical contact.

Real-time static electricity removal

• Compact Size: Can be installed by modifying the View Port without any additional modifications.

• Vacuum degree constant: No separate gas used (Chamber residual gas ionization)

• Damage Free: No light or heat generated (OLED Damage Free)

• High stability and durability: no light or heat generated

• Operating vacuum degree : 10E-3 ~ 1.0E-5(Pa)

• Size : Ø165, H:265

• texture : SUS , SS41

• weight : 7Kg

• Voltage used : DC 4kV , 0.1mA (이내)